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Departamento de Física Aplicada

Seminario: "Development of ultrathin oxides membranes as electron transparent windows for atomic-scale imaging"

Departamento de Física Aplicada
Carlos Morales, Departamento de Física Aplicada, UAM
Sala de Seminarios, Dep. de Física Aplicada (Mód. 12) Facultad de Ciencias. UAM

Free standing ultrathin films of Al2O3 (<3nm) have been developed as electron transparent windows for atomic scale imaging. The oxide is deposited by atomic layer deposition (ALD) on perforated silicon nitride membranes previously covered with transferred graphene, which acts as the support for the oxide on the grid holes. Chemical and structural characterization of the ultrathin films has been carried out by X-ray photoelectron spectroscopy (XPS), electron energy loss spectroscopy (EELS), transmission electron microscopy (TEM) and atomic force microscopy (AFM), showing smooth and continuous coverages from 1.5 nm thickness. Compared to previous graphene windows, the oxide films have a superior tolerance to high energy electron dose. The ultrathin oxides windows could constitute the next generation of electron transparent windows for in-situ study of catalytic and electrochemical interfaces using among a wide range of spectroscopic and imaging techniques.

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